• DocumentCode
    3791247
  • Title

    Special Section on the International Conference on Microelectronic Test Structures

  • Volume
    19
  • Issue
    1
  • fYear
    2006
  • Firstpage
    1
  • Lastpage
    1
  • Keywords
    "Special issues and sections","Microelectronics","Circuit testing","Manufacturing processes","Semiconductor device testing","Semiconductor device manufacture","Data analysis","Materials testing","Sheet materials","Life estimation"
  • Journal_Title
    IEEE Transactions on Semiconductor Manufacturing
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2005.863255
  • Filename
    1588855