DocumentCode

3791822

Title

2005 Best Paper Award

Volume

19

Issue

2

fYear

2006

Firstpage

157

Lastpage

158

Keywords

Awards

Journal_Title

IEEE Transactions on Semiconductor Manufacturing

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/TSM.2006.875919

Filename

1628978