Title :
Fabrication and emitter measurements for a nanoklystron: A novel THz micro-tube source
Author :
Manohara, Harish M. ; Siegel, Peter H. ; Marrese, Colleen ; Chang, Baohe ; Xu, Jimmy
Author_Institution :
Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA
Abstract :
A novel monolithic micro-tube source for submillimeter-wave (300 GHz to 3 THz) power generation is being developed at JPL. The tube takes the form of a simple reflex klystron with dimensions in the micrometer range, fabricated monolithically in silicon using standard MEMS (micro-electro-mechanical systems) fabrication techniques. While different types of cathodes are being considered, the effort has been focused so far on developing highly ordered arrays of carbon nanotubes (CNTs) working as cold field emitters. In this paper we report the progress and some preliminary results on the fabrication of monolithic nanoklystron cavities and CNT-based field emitters.
Keywords :
klystrons; submillimetre wave generation; submillimetre wave tubes; vacuum microelectronics; 300 GHz to 3 THz; C; MEMS fabrication; Si; carbon nanotube cathode; field emitter array; monolithic nanoklystron cavity; reflex klystron; submillimeter-wave power generation; terahertz micro-tube source; Carbon nanotubes; Cathodes; Fabrication; Field emitter arrays; Klystrons; Microelectromechanical systems; Micromechanical devices; Power generation; Silicon; Submillimeter wave technology;
Conference_Titel :
Vacuum Electronics Conference, 2002. IVEC 2002. Third IEEE International
Print_ISBN :
0-7803-7256-5
DOI :
10.1109/IVELEC.2002.999243
