DocumentCode
3804769
Title
Comments on "A New Microwave Method of Measuring Complex Dielectric Constant of High-Permittivity Thin Films"
Volume
24
Issue
3
fYear
1975
Firstpage
279
Lastpage
279
Keywords
"Microwave theory and techniques","Dielectric measurements","Microwave measurements","High-K gate dielectrics","Dielectric thin films","Fluid flow measurement","Electric variables measurement","Laboratories","Microwave technology","Manufacturing"
Journal_Title
IEEE Transactions on Instrumentation and Measurement
Publisher
ieee
ISSN
0018-9456
Type
jour
DOI
10.1109/TIM.1975.4314432
Filename
4314432
Link To Document