• DocumentCode
    3804769
  • Title

    Comments on "A New Microwave Method of Measuring Complex Dielectric Constant of High-Permittivity Thin Films"

  • Volume
    24
  • Issue
    3
  • fYear
    1975
  • Firstpage
    279
  • Lastpage
    279
  • Keywords
    "Microwave theory and techniques","Dielectric measurements","Microwave measurements","High-K gate dielectrics","Dielectric thin films","Fluid flow measurement","Electric variables measurement","Laboratories","Microwave technology","Manufacturing"
  • Journal_Title
    IEEE Transactions on Instrumentation and Measurement
  • Publisher
    ieee
  • ISSN
    0018-9456
  • Type

    jour

  • DOI
    10.1109/TIM.1975.4314432
  • Filename
    4314432