3804769

Comments on "A New Microwave Method of Measuring Complex Dielectric Constant of High-Permittivity Thin Films"

24

3

1975

279

279

"Microwave theory and techniques","Dielectric measurements","Microwave measurements","High-K gate dielectrics","Dielectric thin films","Fluid flow measurement","Electric variables measurement","Laboratories","Microwave technology","Manufacturing"

IEEE Transactions on Instrumentation and Measurement

ieee

0018-9456

jour

10.1109/TIM.1975.4314432

4314432