Thermodynamic and Kinetic Aspects of Heterogeneous Reactions in a Nonisothermal Low Pressure Plasma

Because of its high energy content and a relatively low translational temperature, the plasma of an intense low pressure discharge in a molecular gas is suitable for deposition of thin films and growth of crystals. A simple theoretical approach for estimation of chemical equilibrium composition in such systems has been developed. This approach is useful for planning of experiments, and it opens a way for further, more rigorous theoretical investigations.