DocumentCode :
3806820
Title :
Analysis and Design of Monolithic Rectangular Coaxial Lines for Minimum Coupling
Author :
Yuya Saito;Dejan S. Filipovic
Author_Institution :
Colorado Univ., Boulder
Volume :
55
Issue :
12
fYear :
2007
Firstpage :
2521
Lastpage :
2530
Abstract :
Coupling through holes etched in a common wall between the neighboring surface micromachined rectangular coaxial lines is studied in this paper. Analytical models for single- and multiple-hole structures are developed using Bethe´s small aperture theory, and excellent agreement with finite-element and finite-integration simulations is obtained. These models are used in a circuit-level simulator for efficient optimization of the selected multihole structure. An isolation test structure composed of 200-m center-to-center separated 300-m-tall 50-W rectangular coaxial lines is designed, built, and measured. Coupling levels below 55 dB over 1-cm-long coupling lengths are achieved throughout the -band. It is found that the probe radiation is more than 10 dB higher than the coupling through the common wall holes. This radiation severely affects the accuracy of the measurements and has to be considered when the coupling through the common walls is analyzed.
Keywords :
"Coaxial components","Fabrication","Scanning electron microscopy","Etching","Analytical models","Apertures","Circuit simulation","Coupling circuits","Probes","Micromachining"
Journal_Title :
IEEE Transactions on Microwave Theory and Techniques
Publisher :
ieee
ISSN :
0018-9480
Type :
jour
DOI :
10.1109/TMTT.2007.910092
Filename :
4384452
Link To Document :
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