• DocumentCode
    3807483
  • Title

    Inductively Coupled RF Oxygen Plasma Studied by Spatially Resolved Optical Emission Spectroscopy

  • Author

    Zlatko Kregar;Nika Krstulovic;Slobodan Milosevic;Klemen Kenda;Uro Cvelbar;Miran Mozetic

  • Author_Institution
    Inst. of Phys., Zagreb
  • Volume
    36
  • Issue
    4
  • fYear
    2008
  • Firstpage
    1368
  • Lastpage
    1369
  • Abstract
    Inductively coupled RF oxygen plasma generated by inductive coil wrapped around a linear glass tube is studied. Images of plasma properties in the linear reactor are presented. Plasma diagnostics was performed by spatially resolved optical emission spectroscopy.
  • Keywords
    "Optical coupling","Radio frequency","Oxygen","Spatial resolution","Stimulated emission","Spectroscopy","Plasma properties","Plasma diagnostics","Coils","Glass"
  • Journal_Title
    IEEE Transactions on Plasma Science
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2008.920896
  • Filename
    4493423
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3807483