DocumentCode

3809866

Title

Book review: Methods and Materials in Microelectronic Technology

Author

G. Declerck

Volume

133

Issue

2

fYear

1986

fDate

4/1/1986 12:00:00 AM

Firstpage

63

Journal_Title

IEE Proceedings I - Solid-State and Electron Devices

Publisher

iet

ISSN

0143-7100

Type

jour

DOI

10.1049/ip-i-1.1986.0015

Filename

4644101