DocumentCode

3812593

Title

Erratum: Fast current pulse m.o.s. deep-depletion technique for profiling thin epitaxial and ion-implanted layers

Volume

2

Issue

6

fYear

1978

fDate

11/1/1978 12:00:00 AM

Firstpage

224

Journal_Title

IEE Journal on Solid-State and Electron Devices

Publisher

iet

ISSN

0308-6968

Type

jour

DOI

10.1049/ij-ssed:19780060

Filename

4807612