Title :
Monolithic GaAs MESFET power sensor microsystem
Author :
T. Lalinsky;J. Kuzmik;M. Porges;S. Hascik;Z. Mozolova;L. Grno
Author_Institution :
Inst. of Electr. Eng., Slovak Acad. of Sci., Bratislava, Slovakia
Abstract :
The authors present the principle, technology and properties of a novel power sensor microsystem designed for very precise power measurement in a broad frequency range. Bulk micromachining technology on GaAs was implemented to obtain the desired parameters of the sensor.
Keywords :
"Gallium compounds","Power measurement","Micromachining","MESFET integrated circuits","Detectors","Microsensors"
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19951295
