Title :
Novel optical distance sensor based on MSM technology
Author :
Gulden, Peter ; Becker, Dirk ; Vossiek, Martin
Author_Institution :
Corp. Technol., Siemens AG, Germany
Abstract :
This paper describes a novel distance-sensor concept based on photodiodes in metal-semiconductor-metal technology (MSM). MSM photodiodes can be operated as opto-electronic mixers (OEM) functioning similar to the so-called photonic mixing device (PMD). This paper employs the correlation techniques previously used with the PMD to the MSM. First experimental results obtained with the MSM inserted into the authors´ standard lab setup previously used for PMD testing are provided Additionally different configurations well suited for mixer operation of the MSM are pointed out. Throughout this paper, the similarities of PMD and MSM are pointed out as well as the key differences.
Keywords :
distance measurement; metal-semiconductor-metal structures; optical sensors; photodiodes; MSM photodiodes; correlation techniques; metal-semiconductor-metal technology; mixer operation; optical distance sensor; opto-electronic mixers; time-of-flight distance measurement; Anodes; Distance measurement; Electrodes; Electrooptic devices; Optical devices; Optical mixing; Optical modulation; Optical sensors; Photodiodes; Voltage;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1036994