DocumentCode
381698
Title
Novel optical distance sensor based on MSM technology
Author
Gulden, Peter ; Becker, Dirk ; Vossiek, Martin
Author_Institution
Corp. Technol., Siemens AG, Germany
Volume
1
fYear
2002
fDate
2002
Firstpage
86
Abstract
This paper describes a novel distance-sensor concept based on photodiodes in metal-semiconductor-metal technology (MSM). MSM photodiodes can be operated as opto-electronic mixers (OEM) functioning similar to the so-called photonic mixing device (PMD). This paper employs the correlation techniques previously used with the PMD to the MSM. First experimental results obtained with the MSM inserted into the authors´ standard lab setup previously used for PMD testing are provided Additionally different configurations well suited for mixer operation of the MSM are pointed out. Throughout this paper, the similarities of PMD and MSM are pointed out as well as the key differences.
Keywords
distance measurement; metal-semiconductor-metal structures; optical sensors; photodiodes; MSM photodiodes; correlation techniques; metal-semiconductor-metal technology; mixer operation; optical distance sensor; opto-electronic mixers; time-of-flight distance measurement; Anodes; Distance measurement; Electrodes; Electrooptic devices; Optical devices; Optical mixing; Optical modulation; Optical sensors; Photodiodes; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2002. Proceedings of IEEE
Print_ISBN
0-7803-7454-1
Type
conf
DOI
10.1109/ICSENS.2002.1036994
Filename
1036994
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