• DocumentCode
    381698
  • Title

    Novel optical distance sensor based on MSM technology

  • Author

    Gulden, Peter ; Becker, Dirk ; Vossiek, Martin

  • Author_Institution
    Corp. Technol., Siemens AG, Germany
  • Volume
    1
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    86
  • Abstract
    This paper describes a novel distance-sensor concept based on photodiodes in metal-semiconductor-metal technology (MSM). MSM photodiodes can be operated as opto-electronic mixers (OEM) functioning similar to the so-called photonic mixing device (PMD). This paper employs the correlation techniques previously used with the PMD to the MSM. First experimental results obtained with the MSM inserted into the authors´ standard lab setup previously used for PMD testing are provided Additionally different configurations well suited for mixer operation of the MSM are pointed out. Throughout this paper, the similarities of PMD and MSM are pointed out as well as the key differences.
  • Keywords
    distance measurement; metal-semiconductor-metal structures; optical sensors; photodiodes; MSM photodiodes; correlation techniques; metal-semiconductor-metal technology; mixer operation; optical distance sensor; opto-electronic mixers; time-of-flight distance measurement; Anodes; Distance measurement; Electrodes; Electrooptic devices; Optical devices; Optical mixing; Optical modulation; Optical sensors; Photodiodes; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2002. Proceedings of IEEE
  • Print_ISBN
    0-7803-7454-1
  • Type

    conf

  • DOI
    10.1109/ICSENS.2002.1036994
  • Filename
    1036994