• DocumentCode
    381739
  • Title

    Electrically controlled metal oxide gas sensor designed with PROSA-CHEM

  • Author

    Scheinert, M. ; Doll, T. ; Woellenstein, J. ; Dalin, J. ; Frerichs, H.P. ; Verhoeven, H. ; Lehmann, M.

  • Author_Institution
    Ilmenau Tech. Univ., Germany
  • Volume
    1
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    356
  • Abstract
    In this paper, an electrically controlled metal oxide gas sensor designed with PROSA-CHEM is introduced, specified and realized. The simulator PROSA-CHEM is explained and its function is verified by using realistic sensor data. On the practical side, a first device was fabricated and first measurements were done and compared with the simulation. It is found that the gas sensitivity and selectivity of the sensor can be altered by electric fields.
  • Keywords
    II-VI semiconductors; electric sensing devices; gas sensors; sensitivity; tin compounds; PROSA-CHEM; SnO2; electric fields; gas sensitivity; metal oxide gas sensor; selectivity; sensor data; Conductivity; Crystalline materials; Effective mass; Electrons; Gas detectors; Grain boundaries; Temperature dependence; Tensile stress; Tin; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2002. Proceedings of IEEE
  • Print_ISBN
    0-7803-7454-1
  • Type

    conf

  • DOI
    10.1109/ICSENS.2002.1037116
  • Filename
    1037116
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=381739