Title :
Electrically controlled metal oxide gas sensor designed with PROSA-CHEM
Author :
Scheinert, M. ; Doll, T. ; Woellenstein, J. ; Dalin, J. ; Frerichs, H.P. ; Verhoeven, H. ; Lehmann, M.
Author_Institution :
Ilmenau Tech. Univ., Germany
Abstract :
In this paper, an electrically controlled metal oxide gas sensor designed with PROSA-CHEM is introduced, specified and realized. The simulator PROSA-CHEM is explained and its function is verified by using realistic sensor data. On the practical side, a first device was fabricated and first measurements were done and compared with the simulation. It is found that the gas sensitivity and selectivity of the sensor can be altered by electric fields.
Keywords :
II-VI semiconductors; electric sensing devices; gas sensors; sensitivity; tin compounds; PROSA-CHEM; SnO2; electric fields; gas sensitivity; metal oxide gas sensor; selectivity; sensor data; Conductivity; Crystalline materials; Effective mass; Electrons; Gas detectors; Grain boundaries; Temperature dependence; Tensile stress; Tin; Voltage;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037116
