DocumentCode :
381747
Title :
Mixed nanostructured oxides of Ti and VI-B group elements for gas sensing
Author :
Guidi, Vincenzo ; Comini, Elisabetta ; Faglia, Guido ; Ferroni, Matteo
Author_Institution :
Dipt. di Fisica, Ferrara Univ., Italy
Volume :
1
fYear :
2002
fDate :
2002
Firstpage :
398
Abstract :
In this paper we review the gas-sensing properties of Ti, W, and Mo mixed oxides as thin films achieved via reactive sputtering. We focused on the structural characterization of the films, which proved to be an essential tool for optimization of performance.
Keywords :
annealing; gas sensors; molybdenum compounds; nanostructured materials; sputter deposition; sputtered coatings; thin films; titanium compounds; tungsten compounds; MoO3; TiO2; VI-B group elements; WO3; gas-sensing properties; mixed nanostructured oxides; reactive sputtering; structural characterization; thin film preparation; Annealing; Argon; Atmosphere; Chemical elements; Gases; Oxidation; Physics; Radio frequency; Semiconductor films; Sputtering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
Type :
conf
DOI :
10.1109/ICSENS.2002.1037124
Filename :
1037124
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=381747
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