DocumentCode :
381748
Title :
New materials and technologies for micromachined metal oxide gas sensor arrays
Author :
Wöllenstein, J. ; Böttner, H. ; Plaza, J.A. ; Cané, C.
Author_Institution :
Fraunhofer Inst. Phys. Meas. Techniques, Freiburg, Germany
Volume :
1
fYear :
2002
fDate :
2002
Firstpage :
404
Abstract :
We present a new silicon micromachined low power heater platform comprising sensor arrays which feature a number of different gas sensitive metal oxides. The sensing elements of the arrays are composed of alternatively n-type SnO2, n-type WO3, n-type ZnO, p-type Cr1.8Ti0.2O3+z or n-type V2O5. Characterisation of the arrays under trace gas exposure is presented.
Keywords :
arrays; electric heating; elemental semiconductors; gas sensors; micromachining; microsensors; silicon; CrTiO; Si; Si micromachined heater platform; V2O5; WO3; ZnO; gas sensitive metal oxides; low power heater platform; metal oxide gas sensor arrays; microhotplate; micromachined metal oxide gas sensor arrays; n-type; Energy consumption; Gas detectors; Glass; Inorganic materials; Sensor arrays; Silicon; Temperature distribution; Temperature sensors; Thermal sensors; Thick film sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
Type :
conf
DOI :
10.1109/ICSENS.2002.1037125
Filename :
1037125
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=381748
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