• DocumentCode
    381751
  • Title

    Low drift air-gap CMOS-FET gas sensor

  • Author

    Paris, R. ; Pawel, S. ; Herzer, R. ; Doll, T. ; Kornetzky, Peter ; Gupta, R.P. ; Eranna, G.

  • Author_Institution
    Inst. of Solid State Electron., Technische Univ. Ilmenau, Germany
  • Volume
    1
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    421
  • Abstract
    We developed a low drift CMOS GasFET for a wide variety of gases like H2, NH3 or NO2 combining the advantages of previous CCFET and SGFET concepts. The design comprises an insulated floating electrode structure for hybrid-mounted sensitive gates. The transducer has a low long term drift and temperature coefficient, comparable to a MOSFET, as measurements under real conditions prove.
  • Keywords
    CMOS integrated circuits; MOSFET; capacitance; gas sensors; stability; GasFET; H2; NH3; NO2; air-gap CMOS-FET gas sensor; hybrid-mounted sensitive gates; insulated floating electrode structure; long term drift; low drift gas sensor; temperature coefficient; Air gaps; Capacitors; Electrodes; FETs; Gas detectors; Insulation; MOSFET circuits; Stability; Temperature sensors; Transducers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2002. Proceedings of IEEE
  • Print_ISBN
    0-7803-7454-1
  • Type

    conf

  • DOI
    10.1109/ICSENS.2002.1037128
  • Filename
    1037128
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=381751