Title :
Study of gas sensor based on adsorption heat measurement using Y-cut quartz crystal microbalance
Author :
Saitoh, Atsushi ; Asari, Yukihiro ; Nomura, Tooru
Author_Institution :
Dept. Electr. Commun. Eng., Shibaura Inst. of Technol., Tokyo, Japan
Abstract :
In this paper, we describe the gas sensor using Y-cut quartz resonator. The sensor response property is decided not only by the mass loading effect, but also the heat of adsorption caused when the gas molecule is adsorbed. This type of sensor has a response characteristic different from the conventional sensors using AT-cut resonator that is stable against temperature change around room temperature, even if the gas molecule adsorption characteristic on the surface of the sensor is the same.
Keywords :
crystal resonators; gas sensors; heat of adsorption; microbalances; SiO2; Y-cut quartz crystal microbalance; adsorption heat measurement; gas molecule; gas sensor; heat of adsorption; mass loading effect; molecule adsorption characteristic; response characteristic; sensor response property; temperature change; Absorption; Acoustic sensors; Acoustic waves; Gas detectors; Sensor phenomena and characterization; Sensor systems; Temperature measurement; Temperature sensors; Thermal sensors; Thin film sensors;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037131
