Title :
MEMS-based systems for DNA sequencing and forensics
Author :
Ehrlich, Daniel ; Carey, Loucinda ; Chiou, Jeffrey ; Desmarais, Samantha ; El-Difrawy, Sameh ; Koutny, Lance ; Lam, Roger ; Matsudaira, Paul ; Mckenna, Brian ; Mitnik-Gankin, Luba ; Neil, Tom O. ; Novotny, Mark ; Srivastava, Alok ; Streechon, Phil ; Timp,
Author_Institution :
Whitehead Inst. for Biomed. Res., MIT, Cambridge, MA, USA
Abstract :
We outline some of the most important scientific problems that were overcome in this multiyear project. These include (a) the high-yield microfabrication of zero-defect bonded glass plates at sizes greatly exceeding semiconductor fabrication, (b) the integration of electrodes, reservoirs, and high-pressure seals into these plates, (c) detector optimization for the required very high rate data acquisition and (d) microfluidics issues and optimizations related to channel geometry.
Keywords :
DNA; biological techniques; microelectrodes; microfluidics; molecular biophysics; DNA sequencing; MEMS-based systems; channel geometry; detector optimization; electrodes integration; forensics; high-pressure seals; high-yield microfabrication; microfluidics issues; most important scientific problems; multiyear project; reservoirs; semiconductor fabrication; very high rate data acquisition; zero-defect bonded glass plates; Bonding; DNA; Data acquisition; Detectors; Electrodes; Fabrication; Forensics; Glass; Reservoirs; Seals;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037134
