DocumentCode
381779
Title
GaPO4 crystals for sensor applications
Author
Worsch, Peter M. ; Krempl, Peter W. ; Wallnöfer, Wolfgang
Author_Institution
AVL List GmbH, Graz, Austria
Volume
1
fYear
2002
fDate
2002
Firstpage
589
Abstract
The piezoelectric crystal material gallium (ortho) phosphate GaPO4 can be considered to be the "high tech brother of quartz". The high thermal stability up to 970°C and its high sensitivity make GaPO4 a very attractive choice for a wide range of high temperature applications. Furthermore it shows no pyroelectricity, no outgassing and a high electric resistivity to guarantee high precision piezoelectric measurements. GaPO4 offers good temperature compensation for a new generation of crystal microbalances operating at temperatures up to at least 700°C as shown in thermogravimetric and film thickness measurements. It also allows the production of SAW sensors with a very high thermal stability.
Keywords
compensation; crystal resonators; gallium compounds; microbalances; piezoelectric materials; piezoelectric transducers; surface acoustic wave sensors; thermal analysis; thermal stability; 0 to 970 degC; GaPO4; SAW sensors; crystal microbalances; film thickness measurements; high precision piezoelectric measurements; high temperature applications; piezoelectric crystal material; sensor applications; temperature compensation; thermal stability; thermogravimetric measurements; Crystalline materials; Electric resistance; Electric variables measurement; Piezoelectric films; Piezoelectric materials; Pyroelectricity; Temperature distribution; Temperature sensors; Thermal stability; Thickness measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2002. Proceedings of IEEE
Print_ISBN
0-7803-7454-1
Type
conf
DOI
10.1109/ICSENS.2002.1037166
Filename
1037166
Link To Document