Title :
New substrates for MOEMS
Author :
Reiche, M. ; Hiller, E. ; Stolze, D.
Author_Institution :
Max-Planck Inst. fur Mikrostrukturphysik, Halle, Germany
Abstract :
Bonded hydrophobic wafer pairs (PEW wafers) are applied as alternative substrates for optical devices (pin-diodes and complex MOEMS). Important parameters of diodes are analysed at temperatures up to 160°C (dark current, photocurrent, CV-curves, rise time). Diodes produced on bonded hydrophobic wafer pairs show a similar or better behaviour than components prepared on the standard epitaxial wafers.
Keywords :
dark conductivity; micro-optics; p-i-n diodes; photodetectors; wafer bonding; 20 to 160 degC; CV-curves; MOEMS; bonded hydrophobic wafer pairs; dark current; photocurrent; pin-diodes; rise time; Computational Intelligence Society; Conductivity; Diodes; Optical materials; Photodetectors; Silicon; Substrates; Surface cleaning; Surface contamination; Wafer bonding;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037170
