DocumentCode :
381783
Title :
Enhancement of the low temperature response of thin film gas sensors by UV irradiation
Author :
Comini, E. ; Ottini, L. ; Faglia, G. ; Sberveglieri, G.
Author_Institution :
Brescia Univ., Italy
Volume :
1
fYear :
2002
fDate :
2002
Firstpage :
613
Abstract :
In this work we present recent results regarding the activation of sensors with high power density light with energy in the range of the energy gap of the semiconductor. We report the measurements registered for tin oxide RGTO deposited layers using CO as a target gas. The influence of the doping on the activated gas sensing properties has been investigated. We have found the value of the incident power corresponding to the best gas sensing performances (response enhancement and kinetics). The comparison between dark and irradiation condition is presented for the different kinds of layers tested.
Keywords :
air pollution measurement; gas sensors; semiconductor materials; semiconductor thin films; tin compounds; CO; RGTO; SnO2; UV irradiation; activated gas sensing properties; incident power; irradiation condition; low temperature response; response enhancement; rheotaxial growth and thermal oxidation; thin film gas sensors; Crystalline materials; Gas detectors; Grain boundaries; Kinetic theory; Lattices; Optical sensors; Pollution; Temperature sensors; Thin film sensors; Tin;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
Type :
conf
DOI :
10.1109/ICSENS.2002.1037171
Filename :
1037171
Link To Document :
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