Title :
Frequency selective sensor arrays for vibration measurement
Author :
Scheibner, Dirk ; Wibbeler, Jürgen ; Mehner, Jan
Author_Institution :
Chemnitz Univ. of Technol., Germany
Abstract :
Describes a new microsystem for vibration measurement based on frequency selective sensor arrays with electrically tunable band selectivity for the frequency range from 1 to 10 kHz. The band selectivity is achieved by electrostatic forces.
Keywords :
electrostatic devices; intelligent sensors; micromechanical resonators; microsensors; sensor fusion; vibration measurement; 1 to 10 kHz; band selectivity; electrically tunable band selectivity; electrostatic forces; frequency selective sensor arrays; microelectromechanical sensors; microresonator; smart sensor; vibration measurement; Chemical technology; Electrostatics; Frequency measurement; Resonance; Resonant frequency; Sensor arrays; Sensor phenomena and characterization; Tensile stress; Tuning; Vibration measurement;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037183
