Array of PZT pyroelectric thick-film sensors for contactless measurement of XY position

Author

Ferrari, Vittorio ; Ghisla, Alessio ; Marioli, Daniele ; Taroni, Andrea

Author_Institution

Dip. Elettronica per l´´Automazione, Brescia Univ., Italy

Volume

2

fYear

2002

fDate

2002

Firstpage

889

Abstract

The paper presents the design, fabrication and experimental characterization of a pyroelectric sensor array made by 8×8 pixels of PZT screen printed on an alumina substrate. When an amplitude-modulated light emitting diode (LED) is placed in front of the array and moved in the XY plane parallel to the array surface, the array and the LED respectively work as the reference element and the contactless cursor of a two-dimensional position sensor.

Keywords

arrays; equivalent circuits; lead compounds; light emitting diodes; position measurement; pyroelectric detectors; readout electronics; thick film devices; 2D position sensor; Al₂O₃; PZT pyroelectric thick-film sensors; PZT-Al₂O₃; PbZrO3TiO3-Al2O3; XY position; alumina substrate; amplitude-modulated LED; contactless measurement; fabrication; light emitting diode; pyroelectric sensor array; screen printed PZT; thick-film sensor array; two-dimensional position sensor; Electrodes; Light emitting diodes; Optical arrays; Position measurement; Pyroelectricity; Sensor arrays; Temperature; Thick film sensors; Thick films; Thickness measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2002. Proceedings of IEEE

Print_ISBN

0-7803-7454-1

Type

conf

DOI

10.1109/ICSENS.2002.1037226

Filename

1037226