Title :
A study on the development of a thin-film pressure sensor
Author :
Mihara, Yuji ; Someya, Tsuneo
Author_Institution :
Mech. Eng., Musashi Inst. of Technol., Tokyo, Japan
Abstract :
In order to measure the oil-film pressure in engine bearings, we developed a new piezoresistive thin-film sensor made of Cu-Mn-Ni alloy with a twin-arc shape and reduced and uniform strain sensitivity. This allowed correction of the error in measured pressure due to strain using a thin-film strain sensor made of Ni-Cr-Al alloy effectively. The error in measured pressure due to temperature influence could be also reduced by optimizing the composition of the Cu-Mn-Ni alloy. Even negative pressure or tension generated in an oil-film could be measured by the new thin-film pressure sensor.
Keywords :
copper alloys; manganese alloys; measurement errors; nickel alloys; piezoresistive devices; pressure sensors; sensitivity; thin film devices; Cu-Mn-Ni; Cu-Mn-Ni alloy; engine bearings; oil-film pressure; piezoresistive thin-film sensor; pressure sensitivity; temperature sensitivity; twin-arc shape; uniform strain sensitivity; Capacitive sensors; Engines; Error correction; Piezoresistance; Pressure measurement; Shape measurement; Shape memory alloys; Strain measurement; Temperature sensors; Thin film sensors;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037238
