DocumentCode
381812
Title
A new pressure sensor measured by heat transfer
Author
Ohji, Hiroshi ; Yutani, Naoki ; Taruya, Masaaki ; Koshimizu, Akira ; Kodama, Seiki ; Tsutsumi, Kazuhiko
Author_Institution
ATRC, Mitsubishi Electr. Corp., Hyogo, Japan
Volume
2
fYear
2002
fDate
2002
Firstpage
979
Abstract
This paper presents a newly developed pressure sensor. The principle of its pressure measurement is based on heat transfer from a heat source fabricated on a sensor element to a metal diaphragm, to which pressure is applied. The sensor element is fabricated by micromachining techniques in which four mask process steps are used that are compatible with IC processing. The measurement results show a good linearity (3.5 %FS) and quick response (100 Hz) due to the small thermal capacity of the sensor element.
Keywords
diaphragms; heat transfer; micromachining; microsensors; pressure sensors; four mask process; heat transfer; linearity; metal diaphragm; micromachining techniques; pressure measurement; pressure sensor; sensor element fabrication; Heat sinks; Heat transfer; Micromachining; Piezoresistance; Pollution measurement; Pressure measurement; Resistors; Silicon; Temperature sensors; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2002. Proceedings of IEEE
Print_ISBN
0-7803-7454-1
Type
conf
DOI
10.1109/ICSENS.2002.1037243
Filename
1037243
Link To Document