Intelligent SOI CMOS integrated circuits and sensors for heterogeneous environments and applications

Author

Flandre, D. ; Adriaensen, S. ; Afzalian, A. ; Laconte, J. ; Levacq, D. ; Renaux, C. ; Vancaillie, L. ; Raskin, J.P. ; Demeûs, L. ; Delatte, P. ; Dessard, V. ; Picun, G.

Author_Institution

Res. Center in Micro & Nanoscopic Electron. Devices & Mater. (CeRMiN), Univ. Catholique de Louvain, Louvain-la-Neuve, Belgium

Volume

2

fYear

2002

fDate

2002

Firstpage

1407

Abstract

In this paper, we demonstrate how a simple fully-depleted SOI CMOS process can be adapted to provide a wide range of performance compatible with the realization of heterogeneous micropower, high-temperature or RF micro-systems which involve the integration of sensing, analog and digital components. High-temperature and low-voltage examples are discussed.

Keywords

CMOS integrated circuits; high-temperature electronics; intelligent sensors; micromachining; microsensors; radiofrequency integrated circuits; silicon-on-insulator; RF micro-systems; SOI CMOS integrated circuits; Si; heterogeneous environments; high-temperature devices; intelligent sensors; micromachining; micropower devices; CMOS integrated circuits; CMOS process; CMOS technology; Intelligent sensors; MOSFETs; Magnetic separation; Radio frequency; Silicon on insulator technology; Temperature sensors; Threshold voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2002. Proceedings of IEEE

Print_ISBN

0-7803-7454-1

Type

conf

DOI

10.1109/ICSENS.2002.1037327

Filename

1037327