DocumentCode

3820480

Title

Air isolation for better microcircuits

Volume

16

Issue

5

fYear

1970

fDate

5/1/1970 12:00:00 AM

Firstpage

186

Journal_Title

Electronics and Power

Publisher

iet

ISSN

0013-5127

Type

jour

DOI

10.1049/ep.1970.0166

Filename

5179424