DocumentCode
3825363
Title
SEMI plans 50% expansion
Volume
29
Issue
10
fYear
1983
fDate
10/1/1983 12:00:00 AM
Firstpage
695
Journal_Title
Electronics and Power
Publisher
iet
ISSN
0013-5127
Type
jour
DOI
10.1049/ep.1983.0328
Filename
5186786
Link To Document