DocumentCode :
3825551
Title :
Transmission Electron Microscopy of Silicon VLSI Circuits and Structures
Author :
D.J. Barber
Volume :
30
Issue :
8
fYear :
1984
fDate :
8/1/1984 12:00:00 AM
Firstpage :
641
Journal_Title :
Electronics and Power
Publisher :
iet
ISSN :
0013-5127
Type :
jour
DOI :
10.1049/ep.1984.0346
Filename :
5187054
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3825551
