Numerical Modeling of MOS Dosimeters Under Switched Bias Irradiations

Techniques based on bias switching during the irradiation allow to extend the measurement range of MOS dosimeters. To well predict the response of these sensors under operation conditions it is mandatory to understand the physical phenomena involved. A physics-based numerical model is presented here to reproduce the response of MOS dosimeters under switched bias irradiations. Reported non-monotonic responses after a bias switch were previously explained by the presence of two types of hole traps with different characteristic times. The model presented in this work shows that this behavior can be explained by the spatial charge redistribution using a single trap. The electric field dependences of hole capture and neutralization rates are analyzed and compared with previous experimental results and models in the literature. The spatial distribution of hole traps within the oxide is also analyzed.