Title :
Estimation of load matching conditions for the excimer gas discharge load
Author :
Oleg, Kudryavtsev ; Serguei, Moisseev ; Mutsuo, Nakaoka ; Hideaki, Muraoka
Author_Institution :
Power Electron. Lab., Yamaguchi Univ., Ube, Japan
Abstract :
Excimer gas discharge is recognized as an effective method of ultraviolet light generation, however low energy performances of power supply for such a load hinder its wider application in practice. In order to design more efficient power supply, in this research, frequency characteristics and power matching conditions of the excimer gas discharge load are evaluated. A new method for this evaluation is proposed and the results of its application are introduced in this paper, together with some consideration about power supply.
Keywords :
discharges (electric); excimers; gas-discharge tubes; light sources; parameter estimation; power supplies to apparatus; excimer discharge tube; excimer gas discharge load; load matching conditions estimation; low energy performances; power matching conditions; power supply; ultraviolet light generation; Capacitance; Dielectrics; Discharges; Electron tubes; Frequency estimation; Inductors; Plasma temperature; Power supplies; RLC circuits; Voltage;
Conference_Titel :
Industry Applications Conference, 2002. 37th IAS Annual Meeting. Conference Record of the
Conference_Location :
Pittsburgh, PA, USA
Print_ISBN :
0-7803-7420-7
DOI :
10.1109/IAS.2002.1044098
