DocumentCode :
383271
Title :
Real-time response and system integration in a back-end semiconductor manufacturing system
Author :
Qiu, Robin
Author_Institution :
Dept. of Inf. Sci., Penn State Great Valley, Malvern, UK
Volume :
1
fYear :
2002
fDate :
13-18 Oct. 2002
Firstpage :
622
Abstract :
Real-time response is fundamental to a manufacturing execution system used in a back-end semiconductor manufacturing system (BSMS) on the shop floor. This paper presents a practical solution to easing system integration while improving its real-time responses. First, by incorporating the concept of virtual production lines (VPL) into the manufacturing execution system modeling, the model complexity can be reduced significantly, consequently easing its integration to shop floor controls. Secondly, a new system integration framework is introduced, which guarantees the real-time entries of system data for all the activities occurring on the shop floor. Real-time information helps management make optimal decisions, thus improving the productivity of a BSMS.
Keywords :
management information systems; manufacturing industries; production; real-time systems; semiconductor device manufacture; back-end semiconductor manufacturing system; management; manufacturing execution system modeling; productivity improvement; real-time information; real-time response; shop floor; system integration; virtual production lines; Computer aided manufacturing; Customer relationship management; Enterprise resource planning; Manufacturing processes; Manufacturing systems; Materials requirements planning; Process planning; Real time systems; Supply chain management; Virtual manufacturing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Industry Applications Conference, 2002. 37th IAS Annual Meeting. Conference Record of the
Conference_Location :
Pittsburgh, PA, USA
ISSN :
0197-2618
Print_ISBN :
0-7803-7420-7
Type :
conf
DOI :
10.1109/IAS.2002.1044156
Filename :
1044156
Link To Document :
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