DocumentCode :
3837669
Title :
2009 IEEE International Electron Devices Meeting
Volume :
22
Issue :
4
fYear :
2009
Firstpage :
601
Lastpage :
601
Journal_Title :
IEEE Transactions on Semiconductor Manufacturing
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2009.2035772
Filename :
5308668
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3837669
