DocumentCode :
3849451
Title :
2011 IEEE International Reliabilty Physics Symposium (IRPS)
Volume :
19
Issue :
6
fYear :
2010
Firstpage :
1526
Lastpage :
1526
Journal_Title :
Journal of Microelectromechanical Systems
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2010.2093072
Filename :
5646367
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3849451
