DocumentCode

3849451

Title

2011 IEEE International Reliabilty Physics Symposium (IRPS)

Volume

19

Issue

6

fYear

2010

Firstpage

1526

Lastpage

1526

Journal_Title

Journal of Microelectromechanical Systems

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2010.2093072

Filename

5646367