• DocumentCode
    3849484
  • Title

    Actuated Micro-optical Submount Using a Dielectric Elastomer Actuator

  • Author

    G. Jordan;D. N. McCarthy;N. Schlepple;J. Krißler;H. Schröder;G. Kofod

  • Author_Institution
    Fraunhofer Institute for Reliability and Microintegration, Berlin, Germany
  • Volume
    16
  • Issue
    1
  • fYear
    2011
  • Firstpage
    98
  • Lastpage
    102
  • Abstract
    Analysis of the operating characteristics of a dielectric elastomer actuator (DEA) submount for the high-precision positioning of optical components in one dimension is presented. Precise alignment of a single-mode fiber is demonstrated and variation of the sensitivity of the submount motion by changing the bias voltage is confirmed. A comparison of the performance of the DEA submount with a piezoelectric alignment stage is made, which demonstrates that DEAs could present a very attractive, low-cost alternative to currently used manual technologies in overcoming the hurdle of expensive packaging of single-mode optical components.
  • Keywords
    "Optical sensors","Voltage measurement","Actuators","Materials","Electrodes","Sensitivity","Position measurement"
  • Journal_Title
    IEEE/ASME Transactions on Mechatronics
  • Publisher
    ieee
  • ISSN
    1083-4435
  • Type

    jour

  • DOI
    10.1109/TMECH.2010.2089991
  • Filename
    5658158