Title :
Actuated Micro-optical Submount Using a Dielectric Elastomer Actuator
Author :
G. Jordan;D. N. McCarthy;N. Schlepple;J. Krißler;H. Schröder;G. Kofod
Author_Institution :
Fraunhofer Institute for Reliability and Microintegration, Berlin, Germany
Abstract :
Analysis of the operating characteristics of a dielectric elastomer actuator (DEA) submount for the high-precision positioning of optical components in one dimension is presented. Precise alignment of a single-mode fiber is demonstrated and variation of the sensitivity of the submount motion by changing the bias voltage is confirmed. A comparison of the performance of the DEA submount with a piezoelectric alignment stage is made, which demonstrates that DEAs could present a very attractive, low-cost alternative to currently used manual technologies in overcoming the hurdle of expensive packaging of single-mode optical components.
Keywords :
"Optical sensors","Voltage measurement","Actuators","Materials","Electrodes","Sensitivity","Position measurement"
Journal_Title :
IEEE/ASME Transactions on Mechatronics
DOI :
10.1109/TMECH.2010.2089991