• DocumentCode
    3850714
  • Title

    Integrated MEMS-tunable VCSELs with high modulation bandwidth

  • Author

    B. Kogel;P. Westbergh;A. Haglund;J.S. Gustavsson;A. Larsson

  • Author_Institution
    Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Goteborg 41296, Sweden
  • Volume
    47
  • Issue
    13
  • fYear
    2011
  • fDate
    6/23/2011 12:00:00 AM
  • Firstpage
    764
  • Lastpage
    765
  • Abstract
    The modulation bandwidth of micromachined tunable VCSELs is typically limited by the parasitic capacitance associated with the large mesa platform for the movable mirror. Presented is a simple technology for wafer-scale integration of tunable VCSELs with low mesa capacitance and high modulation bandwidth. Small signal measurements show a 3dB bandwidth of up to 6 GHz over a tuning range of 18 nm. Digital modulation is demonstrated with error-free data transmission at 5 Gbit/s and eye diagrams at 10 Gbit/s.
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el.2011.1494
  • Filename
    5931011
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3850714