On Explanation of the Double-Valued Paschen-Like Curve for RF Breakdown in Argon

This paper represents an investigation of the dependence of the breakdown voltage on the gas pressure in radio-frequency argon discharges under conditions when ion-induced secondary electron production is negligible. Calculations were performed by using a Monte Carlo collision code including electrons only. Our simulation results clearly show a region, occurring at low pressure, where multiple values of the breakdown voltage exist at a given pressure, in agreement with previous experimental observations. The two different regimes of operation, each satisfying the breakdown condition, may be best analyzed in contour plots of electron density, ionization rate, and mean energy.