• DocumentCode
    3852316
  • Title

    A Flexible Underwater Pressure Sensor Array Using a Conductive Elastomer Strain Gauge

  • Author

    Frank M. Yaul;Vladimir Bulovic;Jeffrey H. Lang

  • Author_Institution
    Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology , Cambridge, MA, USA
  • Volume
    21
  • Issue
    4
  • fYear
    2012
  • Firstpage
    897
  • Lastpage
    907
  • Abstract
    This paper presents a flexible pressure sensor array which is demonstrated to transduce underwater pressure variations produced by moving objects and surface waves. The sensors exhibit a 0.0014 fractional resistance change per 100 Pa, achieving a high 1.5-Pa pressure resolution. The measurement has a repeatability of 22% of the peak amplitude of the pressure waveform, due to creep. Additionally, sensor operation while bent to a 0.5-m radius of curvature is demonstrated. Each sensor consists of a strain-concentrating polydimethylsiloxane (PDMS) diaphragm and a resistive strain gauge made of a conductive carbon-black-PDMS composite. A 1-D array of four sensors with a 15-mm center-to-center spacing is fabricated, and the dynamic response of the sensors is characterized and modeled.
  • Keywords
    "Arrays","Strain","Cavity resonators","Electrical resistance measurement","Resistance","Silicon"
  • Journal_Title
    Journal of Microelectromechanical Systems
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2012.2190714
  • Filename
    6177640