DocumentCode
3852316
Title
A Flexible Underwater Pressure Sensor Array Using a Conductive Elastomer Strain Gauge
Author
Frank M. Yaul;Vladimir Bulovic;Jeffrey H. Lang
Author_Institution
Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology , Cambridge, MA, USA
Volume
21
Issue
4
fYear
2012
Firstpage
897
Lastpage
907
Abstract
This paper presents a flexible pressure sensor array which is demonstrated to transduce underwater pressure variations produced by moving objects and surface waves. The sensors exhibit a 0.0014 fractional resistance change per 100 Pa, achieving a high 1.5-Pa pressure resolution. The measurement has a repeatability of 22% of the peak amplitude of the pressure waveform, due to creep. Additionally, sensor operation while bent to a 0.5-m radius of curvature is demonstrated. Each sensor consists of a strain-concentrating polydimethylsiloxane (PDMS) diaphragm and a resistive strain gauge made of a conductive carbon-black-PDMS composite. A 1-D array of four sensors with a 15-mm center-to-center spacing is fabricated, and the dynamic response of the sensors is characterized and modeled.
Keywords
"Arrays","Strain","Cavity resonators","Electrical resistance measurement","Resistance","Silicon"
Journal_Title
Journal of Microelectromechanical Systems
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2012.2190714
Filename
6177640
Link To Document