Title :
Optomechanical simulation of a micromachined interferometric pressure sensor
Author :
Kusko, Mihai ; Nedelcu, Oana Tatiana ; Muller, Raluca
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania
Abstract :
In this paper, we present the results obtained from the optomechanical simulation of a Fabry-Perot pressure sensor. Each mirror of the structure is considered to be composed of a layer of polysilicon and a layer of nitride acting as an antireflective coating for 1.3 μm wavelength.
Keywords :
Fabry-Perot interferometers; Fabry-Perot resonators; antireflection coatings; mechanical engineering computing; micromachining; micromirrors; optical engineering computing; optical fibres; photoreflectance; pressure sensors; refractive index; 1.3 micron; Fabry-Perot pressure sensors; Fabry-Perot resonators; Si3N4-Si; micromachined interferometric pressure sensors; optical fibers; optomechanical simulation; polysilicon/nitride mirrors; reflectivity; refractive index; wavelength dependent antireflective coating; Coatings; Fabry-Perot; Mirrors; Optical fibers; Optical interferometry; Optical refraction; Optical sensors; Optical variables control; Reflectivity; Refractive index;
Conference_Titel :
Semiconductor Conference, 2002. CAS 2002 Proceedings. International
Print_ISBN :
0-7803-7440-1
DOI :
10.1109/SMICND.2002.1105805
