DocumentCode :
3852638
Title :
2012 IEEE Bipolar/Bicmos Circuits and Technology Meeting (BCTM)
Volume :
21
Issue :
3
fYear :
2012
Firstpage :
762
Lastpage :
762
Journal_Title :
Journal of Microelectromechanical Systems
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2012.2201034
Filename :
6205677
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3852638
