DocumentCode

3852638

Title

2012 IEEE Bipolar/Bicmos Circuits and Technology Meeting (BCTM)

Volume

21

Issue

3

fYear

2012

Firstpage

762

Lastpage

762

Journal_Title

Journal of Microelectromechanical Systems

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2012.2201034

Filename

6205677