DocumentCode

3855152

Title

Whatever happened to

Volume

23

Issue

3

fYear

1986

Firstpage

24

Lastpage

30

Keywords

"Substrates","CMOS integrated circuits","Silicon","Insulators","Software","CMOS technology","Crystals"

Journal_Title

IEEE Spectrum

Publisher

ieee

ISSN

0018-9235

Type

jour

DOI

10.1109/MSPEC.1986.6371024

Filename

6371024