Calibration Methods for Microwave Wafer Probing

A new level of accuracy in the measurement of microwave parasitic has been achieved, due to the combined development of microwave wafer probes and on-wafer impedance standards. Repeatable losses and reflections in the probes can be readily removed from measured data, but radiation losses and crosstalk cannot be corrected and must be minimized. Oneport and twoport on-wafer standards for several probe footprints are shown, and their performance verified.