C-Band 6-Bit GaAs Monolithic Phase Shifter

The design, fabrication and test result of a GaAs monolithic 6-bit digital controlled phase shifter for use in the 5 to 6 GHz region are described. The chip includes an analog control bit, (0-11° ) for phase correction in a closed loop configuration. Less than +- 1-degree phase error was achieved on the 11.25°-, 22.5°- and 45° -bits, with +-6-degrees on the 90-degree and 180-degree bits. Over 5 to 6 GHz the return loss was > 15 dB and flatness +-1 dB.