Eddy Current Damping Suppression of Air-Core Monopole Linear Motor for Nanopositioning System

Author

Pan Donghua ; Li Liyi ; Chen Qiming ; Wang Tiecheng ; Peng, E.

Author_Institution

Harbin Inst. of Technol., Harbin, China

Volume

49

Issue

7

fYear

2013

fDate

Jul-13

Firstpage

3957

Lastpage

3960

Abstract

In the nanopositioning system, a damping force is generated by eddy current in the cooling plate and it is a disturbing force for this system. In this paper, a new method is introduced to suppress eddy current by offsetting back EMF. In order to offset back EMF, several slits have been incorporated in the cooling plate, which can help with regulating the series order in every region. Based on the electromagnetic theory, the analytical model of new cooling plate is established. The analytical model and eddy current suppression effect of the new cooling plate are proven by experiment: 17% reduction in the damping force significantly help with reducing the thrust fluctuation, with less than 4% analytical error.

Keywords

cooling; damping; eddy currents; electric potential; linear motors; nanofabrication; nanopositioning; air-core monopole linear motor; cooling plate; damping force reduction; disturbing force; eddy current damping suppression; nanopositioning system; offset back EMF; Analytical models; Cooling; Damping; Eddy currents; Force; Magnetomechanical effects; Metals; Air-core linear motor; analytical model; damping force; eddy current;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2013.2241739

Filename

6558959