• DocumentCode
    3862895
  • Title

    Low loss silicon waveguides for the terahertz spectral region

  • Author

    B. Kuyken;A. Pagies;M. Vanwolleghem;D. Yarekha;J.-F. Lampin;G. Roelkens

  • Author_Institution
    Photonics Research Group, Department of Information Technology, Ghent University-imec, Ghent, Belgium
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    Chip scale terahertz dielectric waveguides, consisting out of high resistivity silicon as a core material have been fabricated. The waveguide loss is measured to be ~1dB/cm at both 1 THz and 2.5 THz.
  • Keywords
    "Optical waveguides","Silicon","Loss measurement","Conductivity","Semiconductor device measurement","Fabrication","Optical losses"
  • Publisher
    ieee
  • Conference_Titel
    Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2015 40th International Conference on
  • ISSN
    2162-2027
  • Electronic_ISBN
    2162-2035
  • Type

    conf

  • DOI
    10.1109/IRMMW-THz.2015.7327676
  • Filename
    7327676
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3862895