Fully-integrated and electronically-controlled millimeter-wave phase modulator

We present a fully-integrated and voltage-controlled millimeter-wave phase modulator based on vanadium dioxide (VO₂). It consists of a resonant reconfigurable meta-surface fabricated on a thin VO₂ film integrated with voltage-controlled heating electrodes. By varying the applied voltage to the heating electrodes, the dielectric properties of the VO₂ layer is controlled and the resonance frequency of the meta-surface is shifted accordingly, introducing a considerable phase shift. We experimentally demonstrate the highest reported phase shift of 60^o at 85 GHz through a fully integrated, voltage-controlled device platform by varying the control voltage from 0 V to 14 V.