DocumentCode :
3863348
Title :
Design of a new flexure-based XYZ parallel nanopositioning stage
Author :
Xiaozhi Zhang;Qingsong Xu
Author_Institution :
Department of Electromechanical Engineering, University of Macau, Avenida da Universidade, Taipa, Macau, China
fYear :
2015
Firstpage :
1962
Lastpage :
1966
Abstract :
This paper concentrates on the mechanism design of a new compact parallel flexure stage with three DOFs. First of all, a bridge-principle amplifier is proposed by a serial connection of two fundamental bridge amplifiers. Then, an analytical study of amplifiers in terms of two-stage amplifiers is conducted by performing finite-element analysis (FEA) simulations. Later, a PPR flexure joint is demonstrated to reduce the cross-axis error. Owing to a larger amplification ratio and flexures, the two-stage amplifier is then employed to devise an XYZ parallel stage with decoupled motion. Driven by three low-voltage piezoelectric stacks, the XYZ stage provides larger decoupled motions by using the two-stacked amplifiers, which directly connect the actuators and output platform with the PPR joints. The performance of the designed stage is verified by FEA simulation study.
Keywords :
"Fasteners","Actuators","Simulation","Nanopositioning","Analytical models","Bridges","Kinematics"
Publisher :
ieee
Conference_Titel :
Robotics and Biomimetics (ROBIO), 2015 IEEE International Conference on
Type :
conf
DOI :
10.1109/ROBIO.2015.7419060
Filename :
7419060
Link To Document :
بازگشت