DocumentCode
387393
Title
The system approach in photonic MEMS commercialization
Author
Vaganov, Vladimir
Author_Institution
MegaSense Inc., Sunnyvale, CA, USA
Volume
2
fYear
2002
fDate
10-14 Nov. 2002
Firstpage
413
Abstract
The system approach considers a priori the interdependence of all technologies integrated into a photonic MEMS product. Enabling wafer-level batch manufacturing through process integration is key to successful product development and meaningful cost reduction.
Keywords
batch processing (industrial); integrated optoelectronics; micro-optics; optical testing; semiconductor device packaging; semiconductor device testing; MEMS packaging; MEMS testing; cost reduction; photonic MEMS commercialization; process integration; successful product development; system approach; wafer-level batch manufacturing; Commercialization; Costs; Electronics packaging; Micromechanical devices; Microstructure; Optical sensors; Packaging machines; Semiconductor device packaging; Testing; Wafer scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE
ISSN
1092-8081
Print_ISBN
0-7803-7500-9
Type
conf
DOI
10.1109/LEOS.2002.1159355
Filename
1159355
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