Title :
The system approach in photonic MEMS commercialization
Author :
Vaganov, Vladimir
Author_Institution :
MegaSense Inc., Sunnyvale, CA, USA
Abstract :
The system approach considers a priori the interdependence of all technologies integrated into a photonic MEMS product. Enabling wafer-level batch manufacturing through process integration is key to successful product development and meaningful cost reduction.
Keywords :
batch processing (industrial); integrated optoelectronics; micro-optics; optical testing; semiconductor device packaging; semiconductor device testing; MEMS packaging; MEMS testing; cost reduction; photonic MEMS commercialization; process integration; successful product development; system approach; wafer-level batch manufacturing; Commercialization; Costs; Electronics packaging; Micromechanical devices; Microstructure; Optical sensors; Packaging machines; Semiconductor device packaging; Testing; Wafer scale integration;
Conference_Titel :
Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7500-9
DOI :
10.1109/LEOS.2002.1159355
