Comprehensive frequency-dependent substrate noise analysis using boundary element methods

We present a comprehensive methodology for the electrodynamic modeling of substrate noise coupling. A new and efficient method is introduced for the calculation of the Green´s function that can accommodate arbitrary substrate doping profiles and thus facilitate substrate noise analysis using boundary element methods. In addition to a discussion of the application of the method and its validation in the context of substrate transfer resistance extraction, preliminary results from its application to frequency-dependent substrate noise modeling are also presented.