Extraction and LVS for mixed-domain integrated MEMS layouts

As design of integrated MicroElectroMechanical Systems (MEMS) matures, there is an increasing need for verification of MEMS layouts. This requires a mixed-domain LVS (layout-versus-schematic) methodology capable of extracting an integrated schematic from the mixed-domain layout and verifying it against the designed schematic. This paper reports on a prototype implementation of MEMS LVS and a MEMS extractor, which, in addition to reconstructing the extracted schematic also captures the domain-specific parasitics in the individual devices. This schematic is then used by a custom schematic-versus-schematic comparator to match connectivity of, various elements between the designed and extracted schematics. Finally, simulation of the extracted schematic also helps in capturing the true behavior of the system.