DocumentCode :
389141
Title :
Carbon diamond-like film in GaAs MDS-structures
Author :
Beletsky, N.I. ; Polyansky, N.E.
Author_Institution :
Kharkiv Nat. Univ., Ukraine
fYear :
2001
fDate :
14-14 Sept. 2001
Firstpage :
462
Lastpage :
463
Abstract :
MDS-structures on basis of gallium-arsenide (GaAs) and carbon diamond-like film (CDLF) are experimentally investigated. The attempt is made to estimate influence of CDLF quality on volt-ampere characteristics of MDS-structures by use laser irradiation for improvement of CDLF quality.
Keywords :
III-V semiconductors; MIS structures; carbon; dielectric thin films; gallium arsenide; laser beam effects; MDS structure; carbon diamond-like film; gallium arsenide; laser irradiation; volt-ampere characteristics;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave and Telecommunication Technology, 2001. CriMiCo 2001. 11th International Conference on
Conference_Location :
Sevastopol, Crimea, Ukraine
Print_ISBN :
966-7968-00-6
Type :
conf
Filename :
1173932
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=389141
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