• DocumentCode
    389141
  • Title

    Carbon diamond-like film in GaAs MDS-structures

  • Author

    Beletsky, N.I. ; Polyansky, N.E.

  • Author_Institution
    Kharkiv Nat. Univ., Ukraine
  • fYear
    2001
  • fDate
    14-14 Sept. 2001
  • Firstpage
    462
  • Lastpage
    463
  • Abstract
    MDS-structures on basis of gallium-arsenide (GaAs) and carbon diamond-like film (CDLF) are experimentally investigated. The attempt is made to estimate influence of CDLF quality on volt-ampere characteristics of MDS-structures by use laser irradiation for improvement of CDLF quality.
  • Keywords
    III-V semiconductors; MIS structures; carbon; dielectric thin films; gallium arsenide; laser beam effects; MDS structure; carbon diamond-like film; gallium arsenide; laser irradiation; volt-ampere characteristics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave and Telecommunication Technology, 2001. CriMiCo 2001. 11th International Conference on
  • Conference_Location
    Sevastopol, Crimea, Ukraine
  • Print_ISBN
    966-7968-00-6
  • Type

    conf

  • Filename
    1173932
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=389141